Past and Future of Precision Engineering. Principle and Application of Scanning Probe Microscope.
نویسندگان
چکیده
منابع مشابه
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15 صفحه اولStudying of various nanolithography methods by using Scanning Probe Microscope
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15 صفحه اولStudying of various nanolithography methods by using Scanning Probe Microscope
The Scanning Probe Microscopes (SPMs) based lithographic techniques have been demonstrated as an extremely capable patterning tool. Manipulating surfaces, creating atomic assembly, fabricating chemical patterns, imaging topography and characterizing various mechanical properties of materials in nanometer regime are enabled by this technique. In this paper, a qualified overview of diverse lithog...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1996
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.62.46